Semiconductor device manufacturing method

ABSTRACT

A first waveguide member is formed, as viewed from above, in an image pickup region and a peripheral region of a semiconductor substrate. A part of the first waveguide member, which part is disposed in the peripheral region, is removed. A flattening step is then performed to flatten a surface of the first waveguide member on the side opposite to the semiconductor substrate.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device manufacturingmethod.

2. Description of the Related Art

Regarding solid-state image pickup devices as one type of semiconductordevice, a solid-state image pickup device including an optical waveguidehas recently been proposed to increase a quantity of light incident on aphotoelectric conversion portion.

Japanese Patent Laid-Open No. 2010-103458 discloses a solid-state imagepickup device including a waveguide that is made up of a clad layerhaving a low refractive index, and a core layer having a high refractiveindex and buried in a groove surrounded by the clad layer. As anexemplary method of manufacturing such a solid-state image pickupdevice, there is disclosed a method of forming the core layer over anentire surface of the clad layer in which an opening is formedcorresponding to the photoelectric conversion portion.

However, the method of manufacturing the solid-state image pickupdevice, disclosed in Japanese Patent Laid-Open No. 2010-103458, has adifficulty in making the solid-state image pickup device flatter. Thisresults in degradation of image quality. Further, in a semiconductordevice other than the solid-state image pickup device, the device heightis increased with a higher degree of integration, and a difficulty inreducing the device height in a manufacturing process may become aproblem to be overcome.

SUMMARY OF THE INVENTION

One embodiment of the present invention provides a method ofmanufacturing a semiconductor device. The semiconductor device includesa semiconductor substrate having a first region and a second region, andan insulator disposed on the first region and the second region. Themethod comprises a first step of forming a plurality of first openingsin a first part of the insulator, wherein the first part of theinsulator is a part thereof disposed on the first region. The methodcomprises a second step of, after the first step, forming a first memberin each of the plurality of first openings and on a second part of theinsulator, wherein the second part of the insulator is a part thereofdisposed on the second region. The method comprises a third step of atleast partially removing a part of the first member, wherein the part ofthe first member is a part thereof disposed on the second part of theinsulator. The method comprises a fourth step of, after the third step,planarizing an exposed surface above the first region and an exposedsurface above the second region.

Another embodiment of the present invention provides a method ofmanufacturing a semiconductor device. The semiconductor device includesa semiconductor substrate having a first region where a plurality ofphotoelectric conversion portions is disposed, and a second region wherea circuit for processing signals from the plurality of photoelectricconversion portions is disposed. The semiconductor device includes aninsulator disposed on the first region and the second region. The methodcomprises a first step of forming a plurality of first openings in afirst part of the insulator such that the plurality of first openingsare respectively overlapped with the plurality of photoelectricconversion portions. The method comprises a second step of, after thefirst step, forming a first member in each of the plurality of firstopenings and on a second part of the insulator, wherein the second partof the insulator is a part thereof disposed on the second region. Themethod comprises a third step of at least partially removing a part ofthe first member, wherein the part of the first member is a part thereofdisposed on the second part of the insulator. The method comprises afourth step of, after the third step, planarizing an exposed surfaceabove the first region and an exposed surface above the second region.

Further features of the present invention will become apparent from thefollowing description of exemplary embodiments with reference to theattached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A illustrates a method of manufacturing a solid-state image pickupdevice according to a first embodiment.

FIG. 1B illustrates the method of manufacturing the solid-state imagepickup device according to the first embodiment.

FIG. 1C illustrates the method of manufacturing the solid-state imagepickup device according to the first embodiment.

FIG. 2A illustrates the method of manufacturing the solid-state imagepickup device according to the first embodiment.

FIG. 2B illustrates the method of manufacturing the solid-state imagepickup device according to the first embodiment.

FIG. 2C illustrates the method of manufacturing the solid-state imagepickup device according to the first embodiment.

FIG. 3 is a schematic view of a planar structure of the solid-stateimage pickup device according to the first embodiment.

FIG. 4A illustrates a method of manufacturing a solid-state image pickupdevice according to a second embodiment.

FIG. 4B illustrates the method of manufacturing the solid-state imagepickup device according to the second embodiment.

FIG. 4C illustrates the method of manufacturing the solid-state imagepickup device according to the second embodiment.

FIG. 5A illustrates the method of manufacturing the solid-state imagepickup device according to the second embodiment.

FIG. 5B illustrates the method of manufacturing the solid-state imagepickup device according to the second embodiment.

FIG. 5C illustrates the method of manufacturing the solid-state imagepickup device according to the second embodiment.

FIG. 6A illustrates the method of manufacturing the solid-state imagepickup device according to the second embodiment.

FIG. 6B illustrates the method of manufacturing the solid-state imagepickup device according to the second embodiment.

FIG. 6C illustrates the method of manufacturing the solid-state imagepickup device according to the second embodiment.

DESCRIPTION OF THE EMBODIMENTS

The present invention is concerned with a semiconductor devicemanufacturing method. More specifically, the manufacturing method can beapplied to a construction in which an insulator on a semiconductorsubstrate has a first region where a plurality of openings is disposedat a first density, and a second region where a plurality of openings isdisposed at a second density smaller than the first density, theplurality of openings in the first region being filled with a fillingmember. The second density may be zero. In such a construction, a filmthickness of the filling member is reduced only in the second region.

Embodiments of the present invention can be applied to, for example, amethod of manufacturing a solid-state image pickup device. Thesolid-state image pickup device is a semiconductor device including asemiconductor substrate on which a plurality of photoelectric conversionportions is disposed. More specifically, the manufacturing method isapplicable to the case that optical waveguides are formed, for example,by forming openings respectively corresponding to the plurality ofphotoelectric conversion portions and filling a high refractive-indexmaterial in the openings. In that case, the above-mentioned secondregion corresponds to a peripheral region where a circuit for processingsignals generated in the photoelectric conversion portions is disposed.Thus, in the peripheral region, the openings for forming the opticalwaveguides are usually not formed or, even if formed, at a smallerdensity than that in an image pickup region.

An embodiment of the present invention will be described below, by wayof example, in connection with the method of manufacturing thesolid-state image pickup device. A semiconductor substrate 101 includesan image pickup region 103 where a plurality of photoelectric conversionportions 105 is disposed, and a peripheral region 104 where a circuitfor processing signals from the photoelectric conversion portions 105 isdisposed. An insulator is disposed on the semiconductor substrate 101.The insulator includes, e.g., a plurality of interlayer insulating films113 a to 113 e.

First, openings 116 are formed in the insulator. In the insulator, theopenings 116 are formed at positions respectively overlying the pluralphotoelectric conversion portions 105. A large number of photoelectricconversion portions 105 can be disposed in the image pickup region 103.Thus, a density of the openings 116 is higher in the image pickup region103 than in the peripheral region 104.

Next, a first waveguide member 118 is formed on the insulator in whichthe openings are formed. The first waveguide member 118 is formed on theinsulator, which is disposed on the image pickup region 103, such thatthe first waveguide member 118 fills the insides of the openings 116.The first waveguide member 118 is further formed on the insulator thatis disposed on the peripheral region 104. At that time, it is notnecessarily required that the insides of the openings 116 are entirelyfilled with the first waveguide member 118. A void may be left in a partof the inside of the opening 116.

A part of the first waveguide member 118, which part is disposed in theperipheral region 104 as viewed from above (i.e., above the peripheralregion 104), is removed. For example, etching or liftoff can be used asa method of removing the first waveguide member 118. The part of thefirst waveguide member 118, which part is removed, will be describedbelow from the viewpoints of looking the relevant part from above (in aplan view) and in the direction of depth thereof.

As viewed in a plan view, the part of the first waveguide member 118,which part is disposed in the peripheral region 104, is removed at leastpartially. In one embodiment, the part of the first waveguide member118, disposed in the peripheral region 104, is mostly removed. Moreover,the part of the first waveguide member 118, disposed in the peripheralregion 104, may entirely remove.

Regarding the extent of removal in the depth direction, at least a partof the first waveguide member 118 is removed. In other words, a filmthickness of the first waveguide member 118 disposed in the peripheralregion 104 is reduced. The first waveguide member 118 is removed to suchan extent that the first waveguide member 118 is partially left and theunderlying insulator is not exposed. However, the first waveguide member118 may be entirely removed in the depth direction. In other words, thefirst waveguide member 118 may be removed until the underlying insulatoris exposed.

After removing the part of the first waveguide member 118, which part isdisposed in the peripheral region 104, the image pickup region 103 andthe peripheral region 104 are planarized, or flattened.

Beneficial effect obtained with the above-described manufacturing methodis as follows. When the first waveguide member 118 is formed in separatesurfaces on which the openings 116 are disposed at densities muchdifferent from each other, such as represented by the image pickupregion 103 and the peripheral region 104, a large level differenceoccurs between the surface in which the density of the openings 116 ishigh and the surface in which the density of the openings 116 is low.For that reason, the level difference cannot be satisfactorily reducedby a planarizing step that is carried out in the related art.

In contrast, according to the embodiment of the present invention, thepart of the first waveguide member 118, which part is disposed in theperipheral region 104, is removed. The part of the first waveguidemember 118, disposed in the peripheral region 104, corresponds to a partlocating at a higher level. With such a removing step, the leveldifference between the image pickup region 103 and the peripheral region104 can be reduced to some extent before the start of the planarizingstep. As a result, an exposed surface can be satisfactorily planarized,or flattened, in the subsequent planarizing step.

Generally, in a method of manufacturing a semiconductor device, aplurality of chips is formed on one wafer. In a solid-state image pickupdevice, particularly, the image pickup region 103 and the peripheralregion 104 are alternately disposed at a relatively long period.Therefore, the level difference also tends to occur at a relatively longperiod. It is difficult to reduce that type of the level difference byCMP (Chemical Mechanical Polishing), for example. Thus, theabove-mentioned problem with the planarizing step is more significant inthe related-art method of manufacturing the solid-state image pickupdevice. For that reason, applying the embodiment of the presentinvention to the method of manufacturing the solid-state image pickupdevice is highly beneficial.

It is to be noted that the embodiment of the present invention is notlimited to the method of manufacturing the solid-state image pickupdevice. For example, when a wiring is formed by the damascene processdescribed later, a metal film is formed on an insulator in whichopenings are formed. At that time, if there is a distribution in densityof the openings formed in the insulator, the metal film may be formedrelatively thin in a portion where the density of the openings is high,and relatively thick in a portion where the density of the openings islow. The damascene process is widely used as a method of forming awiring in not only the solid-state image pickup device, but also ingeneral semiconductor devices. The embodiment of the present inventioncan be applied to processes for manufacturing those semiconductordevices with intent to reduce the level difference.

While the following description is made on the case where an electron isa signal charge, the signal charge may be a hole. When the hole is thesignal charge, the following description is similarly adaptable just byreversing the conductivity type of each semiconductor region.

First Embodiment

A method of manufacturing a solid-state image pickup device, accordingto a first embodiment of the present invention, will be described belowwith reference to the drawings. FIGS. 1A to 1C and 2A to 2C areschematic views of a cross-sectional structure of the solid-state imagepickup device in successive steps of the manufacturing method accordingto the first embodiment.

A solid-state image pickup device 100 includes a semiconductor substrate101. The semiconductor substrate 101 is a portion, which is made of asemiconductor material, among components constituting the solid-stateimage pickup device. The semiconductor substrate involves a substratethat is obtained by forming, in a semiconductor wafer, a semiconductorregion with an ordinary semiconductor manufacturing process. Thesemiconductor material is, e.g., silicon. An interface between thesemiconductor material and another material is a principal surface 102of the semiconductor substrate 101. The other material is, e.g., athermally oxidized film that is disposed on the semiconductor substratein contact with the semiconductor substrate.

In this embodiment, an ordinary semiconductor substrate can be used asthe semiconductor substrate 101. P-type semiconductor regions and N-typesemiconductor regions are disposed in the semiconductor substrate 101.Reference numeral 102 denotes the principal surface of the semiconductorsubstrate 101. In this embodiment, the principal surface 102 of thesemiconductor substrate 101 is provided by an interface between thesemiconductor substrate 101 and the thermally oxidized film (not shown)stacked on the semiconductor substrate 101. The semiconductor substrate101 includes an image pickup region 103 where a plurality of pixels isdisposed, and a peripheral region 104 where a signal processing circuitfor processing signals from the pixels is disposed. The image pickupregion 103 and the peripheral region 104 are described later.

It is to be noted that, in this specification, the term “plane” impliesa plane parallel to the principal surface 102. For example, theprincipal surface 102 in a region where photoelectric conversionportions (described later) are disposed, or the principal surface 102 ina channel of a MOS transistor may be regarded as a reference. In thisspecification, the term “cross-section” implies a plane crossing theabove-defined plane.

In steps until obtaining the structure illustrated in FIG. 1A, thesemiconductor regions are formed in the semiconductor substrate 101, andgate electrodes and multilayer wirings are formed on the semiconductorsubstrate 101. Photoelectric conversion portions 105, a floatingdiffusion (hereinafter abbreviated to “FD”) 106, and source/drainregions in a well 107 for a pixel transistor are formed in the imagepickup region 103 of the semiconductor substrate 101. The photoelectricconversion portions 105 are each, for example, in the form of aphotodiode. The photoelectric conversion portion 105 includes the N-typesemiconductor region disposed in the semiconductor substrate 101.Electrons generated by photoelectric conversion are collected in theN-type semiconductor region of the photoelectric conversion portion 105.The FD 106 is made of another N-type semiconductor region. The electronsgenerated in the photoelectric conversion portion 105 are transferred tothe FD 106 and are converted to a voltage. The FD 106 is electricallyconnected to an input node of an amplification portion. Alternatively,the FD 106 may be electrically connected to a signal output line. Inthis embodiment, the FD 106 is electrically connected to a gateelectrode 110 b of an amplification transistor via a plug 114. Sourceand drain regions of the amplification transistor for amplifying asignal, source and drain regions of a reset transistor for resetting aninput node of the amplification transistor, etc. are formed in the well107 for the pixel transistor. A well 108 for a peripheral transistor isformed in the peripheral region 104 of the semiconductor substrate 101.Source and drain regions of the peripheral transistor, which constitutesthe signal processing circuit, are formed in the well 108 for theperipheral transistor. In addition, an element isolation portion 109 maybe formed in the semiconductor substrate 101. The element isolationportion 109 electrically isolates the pixel transistor or the peripheraltransistor from the other elements. The element isolation portion 109 isformed by, e.g., STI (Shallow Trench Isolation) or LOCOS (LOCalOxidation of Silicon).

Further, in the steps until obtaining the structure illustrated in FIG.1A, transfer gate electrodes 110 a and gate electrodes 110 b are formed.The transfer gate electrodes 110 a and the gate electrodes 110 b aredisposed on the semiconductor substrate 101 with oxide films (not shown)interposed therebetween. Each of the transfer gate electrodes 110 acontrols transfer of charges between the photoelectric conversionportion 105 and the FD 106. The gate electrodes 110 b serve asrespective gates of the pixel transistor and the peripheral transistor.

Moreover, in the steps until obtaining the structure illustrated in FIG.1A, a protective layer 111 is formed on the semiconductor substrate 101.The protective layer 111 is, e.g., a silicon nitride film. Theprotective layer 111 may be made up of plural layers including a siliconnitride film and a silicon oxide film. Also, the protective layer 111may have the function of reducing damage that is possibly exerted on thephotoelectric conversion portions in subsequent steps. Alternatively,the protective layer 111 may have the anti-reflective function.Alternatively, the protective layer 111 may have the function ofpreventing diffusion of a metal in a silicide forming step. Further, anetch stop member 117 is formed on a surface of the protective layer 111on the side opposite to the semiconductor substrate 101. In oneembodiment, the etch stop member 117 has a larger area than that of thebottom of the opening 116 that is formed in a later step. It is to benoted that the protective layer 111 and the etch stop member 117 are notnecessarily required.

Then, the first wiring layer 112 a, the second wiring layer 112 b, andthe plural interlayer insulating films 113 a to 113 e are formed. Inthis embodiment, the first wiring layer 112 a and the second wiringlayer 112 b are formed by the damascene process. For convenience ofexplanation, the plural interlayer insulating films are called the firstto fifth interlayer insulating films 113 a to 113 e successively fromthe side closest to the semiconductor substrate 101.

The first interlayer insulating film 113 a is formed in the image pickupregion 103 and the peripheral region 104. A surface of the firstinterlayer insulating film 113 a on the side opposite to thesemiconductor substrate 101 may be planarized, or flattened, asrequired. Through-holes are formed in the first interlayer insulatingfilm 113 a. Plugs 114 for electrically connecting the electroconductivemembers in the first wiring layer 112 a and the semiconductor regions ofthe semiconductor substrate 101 are disposed in the through-holes. Theplugs 114 are each made of an electroconductive material. The plug 114is made of, e.g., tungsten.

Next, the second interlayer insulating film 113 b is formed on a surfaceof the first interlayer insulating film 113 a on the side opposite tothe semiconductor substrate 101. Parts of the second interlayerinsulating film 113 b, which parts correspond to regions where theelectroconductive members in the first wiring layer 112 a are to bedisposed, are removed by etching. Thereafter, a metal film serving as amaterial of the first wiring layer 112 a is formed in the image pickupregion 103 and the peripheral region 104. Thereafter, the metal film isremoved by CMP, for example, until the second interlayer insulating film113 b is exposed. With the above-described procedures, theelectroconductive members constituting the wiring in the first wiringlayer 112 a are disposed in a predetermined pattern.

Then, the third interlayer insulating film 113 c and the fourthinterlayer insulating film 113 d are successively formed in the imagepickup region 103 and the peripheral region 104. Parts of the fourthinterlayer insulating film 113 d, which parts correspond to the regionswhere the electroconductive members in the second wiring layer 112 b areto be disposed, are removed by etching. Next, parts of the thirdinterlayer insulating film 113 c, which parts correspond to the regionswhere plugs for electrically connecting the electroconductive members inthe first wiring layer 112 a and the electroconductive members in thesecond wiring layer 112 b are to be disposed, are removed by etching.Thereafter, a metal film serving as a material of both the second wiringlayer 112 b and the plugs is formed in the image pickup region 103 andthe peripheral region 104. Thereafter, the metal film is removed by CMP,for example, until the fourth interlayer insulating film 113 d isexposed. With the above-described procedures, a wiring pattern for thesecond wiring layer 112 b and a pattern for the plugs are obtained.Alternatively, after forming the third interlayer insulating film 113 cand the fourth interlayer insulating film 113 d, the parts correspondingto the regions where the plugs for electrically connecting theelectroconductive members in the first wiring layer 112 a and theelectroconductive members in the second wiring layer 112 b are to bedisposed may be removed earlier by etching.

Finally, the fifth interlayer insulating film 113 e is formed in theimage pickup region 103 and the peripheral region 104. A surface of thefifth interlayer insulating film 113 e on the side opposite to thesemiconductor substrate 101 may be planarized, or flattened, by CMP, forexample.

The first wiring layer 112 a and the second wiring layer 112 b may beformed by some other method than the damascene process. One example ofthe method other than the damascene process is described below. Afterforming the first interlayer insulating film 113 a, the metal filmserving as the material of the first wiring layer 112 a is formed in theimage pickup region 103 and the peripheral region 104. Next, parts ofthe metal film other than the regions where the electroconductivemembers in the first wiring layer 112 a are to be disposed are removedby etching. As a result, a wiring pattern for the first wiring layer 112a is obtained. Then, after forming the second interlayer insulating film113 b and the third interlayer insulating film 113 c, the second wiringlayer 112 b is formed in a similar manner. After forming the secondwiring layer 112 b, the fourth interlayer insulating film 113 d and thefifth interlayer insulating film 113 e are formed. Respective surfacesof the third interlayer insulating film 113 c and the fifth interlayerinsulating film 113 e on the side opposite to the semiconductorsubstrate 101 may be planarized, or flattened.

The first wiring layer 112 a and the second wiring layer 112 b aredisposed at different heights from the principal surface of thesemiconductor substrate 101 as a reference. In this embodiment, theelectroconductive members in both the first wiring layer 112 a and thesecond wiring layer 112 b are made of copper. The electroconductivemembers may be made of other material than copper insofar as thematerial is electrically conductive. Except for the parts electricallyinterconnected by the plugs, the electroconductive members in the firstwiring layer 112 a and the electroconductive members in the secondwiring layer 112 b are insulated from each other by the third interlayerinsulating film 113 c. It is to be noted that the number of wiringlayers is not limited to two, and the wiring layer may be formed as asingle layer or three or more layers.

An etch stop film, a metal diffusion preventive film, or a film havingboth the etch stop function and the metal diffusion preventive functionmay be disposed between adjacent two of the interlayer insulating films.In this embodiment, the plural interlayer insulating films 113 a to 113e are each a silicon oxide film. A silicon nitride film serves as ametal diffusion preventive film for the silicon oxide film. Therefore, adiffusion preventive film 115 is disposed between adjacent two of theinterlayer insulating films. The diffusion preventive film 115 is notnecessarily required to be disposed.

In a step illustrated in FIG. 1B, the openings 116 are each formedthrough respective regions of the plural interlayer insulating films 113a to 113 e, which regions are positioned overlying the photoelectricconversion portions 105. In the case where the diffusion preventive film115 is disposed, openings are also formed in regions of the diffusionpreventive film 115 corresponding to the photoelectric conversionportions 105.

First, a mask pattern (not shown) for etching is stacked on a surface ofthe fifth interlayer insulating film 113 e on the side opposite to thesemiconductor substrate 101. The mask pattern for etching is formedexcept for a region where the opening 116 is to be disposed. In otherwords, the mask pattern for etching has an opening in the region wherethe opening 116 is to be disposed. The mask pattern for etching is, forexample, a photoresist that is patterned by photolithography anddevelopment.

Then, the plural interlayer insulating films 113 a to 113 e and thediffusion preventives film 115 are etched while the mask pattern foretching is used as a mask. As a result, the opening 116 is formed.Alternatively, the opening 116 may be formed by repeating the etchingseveral times under different conditions. The mask pattern for etchingmay be removed after the etching.

When the etch stop member 117 is disposed, the etching is performed inthe step illustrated in FIG. 1B until the etch stop member 117 isexposed. Under conditions for etching the first interlayer insulatingfilm 113 a, an etching rate of the etch stop member 117 is set to besmaller than that of the first interlayer insulating film 113 a. Whenthe first interlayer insulating film 113 a is a silicon oxide film, theetch stop member 117 can be a silicon nitride film or a siliconoxynitride film. Further, the etch stop member 117 may be exposed byrepeating the etching several times under different conditions.

Regarding a cross-sectional shape of the opening 116, the opening 116 isnot necessarily required to penetrate through all the first to fifthinterlayer insulating films 113 a to 113 e. The opening 116 may be arecess formed in the fifth interlayer insulating film 113 e.Alternatively, the opening 116 may penetrate partially the first tofifth interlayer insulating films 113 a to 113 e. The opening 116 hassuch a plan shape that the boundary of the opening 116 has a closedloop, e.g., a circle or a rectangle. Alternatively, the plan shape ofthe opening 116 may be a groove-like shape extending over two or morephotoelectric conversion portions 105. Thus, in this specification,when, in a certain plane, a region where the fifth interlayer insulatingfilm 113 e is not disposed is surrounded by or sandwiched betweenregions where the fifth interlayer insulating film 113 e is disposed, itis said that the fifth interlayer insulating film 113 e has the opening116.

When looking at the opening 116 in a plan view, at least a part of theopening 116 is positioned in overlapped relation to the photoelectricconversion portion 105. In other words, when the opening 116 and thephotoelectric conversion portion 105 are projected to the same plane,projected regions of both the opening 116 and the photoelectricconversion portion 105 overlap with each other in the same plane.

In this embodiment, the opening 116 is formed in the region overlappingwith the photoelectric conversion portion 105, and the opening 116 isnot formed in the peripheral region 104. However, the opening 116 may beformed in the peripheral region 104. In that case, a density of theopenings 116 formed in the image pickup region 103 is set to be higherthan that of the openings 116 formed in the peripheral region 104. Thedensity of the openings 116 can be determined as the number of openings116 disposed per unit area. Alternatively, the density of the openings116 may be determined as a proportion of areas occupied by the openings116.

In a step illustrated in FIG. 1C, the first waveguide member 118 isformed inside the openings 116 and on the fifth interlayer insulatingfilm 113 e. More specifically, the first waveguide member 118 is formedin the image pickup region 103 and the peripheral region 104. The firstwaveguide member 118 can be formed, for example, by a film formingprocess, such as CVD (Chemical Vapor Deposition) or sputtering, or bycoating an organic material such as represented by a polyimide-basedhigh polymer. The first waveguide member 118 may be formed throughplural steps under different conditions. In that case, for example, thefirst waveguide member 118 may be formed in a first step under thecondition suitable for increasing adhesion with respect to theunderlying layer, and the first waveguide member 118 may be formed in asubsequent step under the condition suitable for improving acharacteristic for filling the inside of the opening 116. Alternatively,the first waveguide member 118 may be formed by forming different typesof materials in order. For example, the first waveguide member 118 maybe formed by first depositing a silicon nitride film, and thendepositing an organic material with a higher filling characteristic.When the first interlayer insulating film 113 a has been etched in thestep of FIG. 1B until the etch stop member 117 is exposed, the firstwaveguide member 118 is disposed in contact with the etch stop member117.

The material of the first waveguide member 118 is to have a higherrefractive index than that of the material of the interlayer insulatingfilms 113 a to 113 e. When the interlayer insulating films 113 a to 113e are silicon oxide films, the material of the first waveguide member118 can be, e.g., a silicon nitride film or a polyimide-based organicmaterial. The refractive index of the silicon nitride film is in therange of 1.7 to 2.3. The refractive index of the surrounding siliconoxide film is in the range of 1.4 to 1.6. Therefore, light incident onthe interface between the first waveguide member 118 and each of theinterlayer insulating films 113 a to 113 e is reflected on the basis ofthe Snell's law. As a result, the light can be enclosed inside the firstwaveguide member 118. Further, the hydrogen content of the siliconnitride film can be increased such that dangling bonds in the substrateare terminated by the hydrogen supply effect. This is effective inreducing noise, such as white defects. The refractive index of thepolyimide-based organic material is about 1.7. The fillingcharacteristic of the polyimide-based organic material is superior tothat of the silicon nitride film. It is desirable that the material ofthe first waveguide member 118 is suitably selected in consideration ofbalance between optical characteristics, such as difference inrefractive index, and the beneficial effect from the viewpoint of themanufacturing process.

The positional relationships between the plural interlayer insulatingfilms 113 a to 113 e and the first waveguide member 118 filled in theopening 116 will be described below. In a certain plane, the regionwhere the first waveguide member 118 is disposed is surrounded by orsandwiched between the regions where the plural interlayer insulatingfilms 113 a to 113 e are disposed. In other words, respective firstparts of the plural interlayer insulating films 113 a to 113 e,respective second parts thereof differing from the first parts, and thefirst waveguide member 118 filled in the opening 116 are positioned in aline in a direction crossing the direction in which the photoelectricconversion portion 105 and the first waveguide member 118 filled in theopening 116 are positioned in a line. The direction crossing thedirection in which the photoelectric conversion portion 105 and thefirst waveguide member 118 filled in the opening 116 are positioned in aline is, for example, a direction parallel to the principal surface 102of the semiconductor substrate 101.

The first waveguide member 118 is disposed at a position overlying thephotoelectric conversion portion 105 on the semiconductor substrate 101.The plural interlayer insulating films 113 a to 113 e are disposedaround the first waveguide member 118. The refractive index of thematerial forming the first waveguide member 118 is higher than that ofthe material forming the plural interlayer insulating films 113 a to 113e. With that relationship in refractive index, of the light incident onthe first waveguide member 118, a quantity of light leaking to theplural interlayer insulating films 113 a to 113 e can be reduced.Therefore, when at least a part of the first waveguide member 118 isdisposed in overlapped relation to the photoelectric conversion portion105, a quantity of light incident on the photoelectric conversionportion 105 can be increased.

The refractive index of the first waveguide member 118 is not alwaysneeded to be higher than that of the plural interlayer insulating films113 a to 113 e. The first waveguide member 118 can function as anoptical waveguide insofar as the light incident on the first waveguidemember 118 does not leak to the surrounding insulator. For example, amember for reflecting the incident light may be formed on an innersidewall of the opening 116, and the first waveguide member 118 may befilled in the remaining inside of the opening 116. Alternatively, an airgap may exist between the first waveguide member 118 filled in theopening 116 and the plural interlayer insulating films 113 a to 113 e.The air gap may be held in a vacuum state or may be filled with a gas.In such a case, the refractive index of the material forming the firstwaveguide member 118 and the refractive index of the material formingthe plural interlayer insulating films 113 a to 113 e may be set in anymagnitude relationship therebetween.

Next, in a step illustrated in FIG. 2A, a part of the first waveguidemember 118, which part is disposed in the peripheral region 104, isremoved. In this step, an etching mask (not shown) is first stacked onthe first waveguide member 118. The etching mask has an opening at aposition corresponding to the peripheral region 104. The part of thefirst waveguide member 118, disposed in the peripheral region 104, isthen removed by etching.

At that time, the part of the first waveguide member 118, which part isdisposed in the peripheral region 104, is etched away such that thefirst waveguide member 118 is left in a predetermined film thickness.With the presence of the first waveguide member 118 in the predeterminedfilm thickness, damage possibly exerted on the semiconductor substrateside by the etching can be reduced. As an alternative, the firstwaveguide member 118 may be removed until the fifth interlayerinsulating film 113 e is exposed.

In this embodiment, the part of the first waveguide member 118, whichpart is disposed over the entire peripheral region 104, is etched.Stated another way, the etching mask is not disposed in the peripheralregion 104. Thus, it is desirable that a relatively large area isetched. However, the part of the first waveguide member 118, disposed inthe peripheral region 104, may be partially removed. Herein, the term“area” implies an area measured in the plane.

The method of removing the part of the first waveguide member 118, whichpart is disposed in the peripheral region 104, is not limited to theetching. For example, liftoff may be used to remove that part of thefirst waveguide member 118. In the case of liftoff, more specifically,an underlying film is formed in the peripheral region 104 before formingthe first waveguide member 118. By removing the underlying film afterforming the first waveguide member 118, the first waveguide member 118disposed on the underlying film is also removed at the same time.

In the step illustrated in FIG. 2A, a part of the first waveguide member118, which part is disposed in the image pickup region 103, may also beremoved.

In a step illustrated in FIG. 2B, the surface of the first waveguidemember 118 on the side opposite to the semiconductor substrate 101 isplanarized, or flattened. The planarizing of the first waveguide member118 is performed by, e.g., CMP, polishing, or etching. In thisembodiment, the first waveguide member 118 is planarized, or flattenedby CMP.

In the step illustrated in FIG. 2B, the surface of the first waveguidemember 118 on the side opposite to the semiconductor substrate 101 isnot necessarily to be completely flat. A level difference in the surfaceof the first waveguide member 118 on the side opposite to thesemiconductor substrate 101 before the planarizing is reduced by theplanarizing step. For example, in the peripheral region 104, a filmthickness of the first waveguide member 118 after the planarizing may bein the range of 200 nm to 500 nm. Also, in a zone of the image pickupregion 103 where the openings 116 are not disposed, a film thickness ofthe first waveguide member 118 after the planarizing may be in the rangeof 50 nm to 350 nm.

In this embodiment, the surface of the first waveguide member 118 on theside opposite to the semiconductor substrate 101 is exposed when theplanarizing step is performed. Therefore, the exposed surface of thefirst waveguide member 118 disposed above the image pickup region 103(i.e., in the image pickup region 103 as viewed from above) and theexposed surface of the first waveguide member 118 disposed above theperipheral region 104 (i.e., in the peripheral region 104 as viewed fromabove) are planarized, or flattened. When another member is formed onthe first waveguide member 118, an exposed surface of the other memberis planarized, or flattened. As an alternative, when the first waveguidemember 118 is removed in the step of FIG. 2A until the underlying fifthinterlayer insulating film 113 e is exposed, an exposed surface of thefifth interlayer insulating film 113 e is planarized, or flattened.

The planarizing in the step of FIG. 2B may be performed such that thelevel difference between the exposed surface positioned above the imagepickup region 103 and the exposed surface positioned above theperipheral region 104 is reduced. Alternatively, the planarizing may beperformed in a plane including the exposed surface positioned above theimage pickup region 103, while the planarizing may be performed in aplane including the exposed surface positioned above the peripheralregion 104.

Next, in steps until obtaining the structure illustrated in FIG. 2C, asixth interlayer insulating film 119, a third wiring layer 121 c, andin-layer lenses 120 are formed. First, the sixth interlayer insulatingfilm 119 is formed on the first waveguide member 118. The sixthinterlayer insulating film 119 is made of the same material as that ofthe fifth interlayer insulating film 113 e. In this embodiment, thesixth interlayer insulating film 119 is a silicon oxide film. Athrough-hole is then formed in which a plug 121 for electricallyconnecting a predetermined electroconductive member in the second wiringlayer 112 b and a predetermined electroconductive member in the thirdwiring layer 121 c is to be disposed. The plug 121 is then formed in thethrough-hole.

Next, the third wiring layer 121 c is formed. In this embodiment, theelectroconductive member in the third wiring layer 121 c is made ofaluminum. The third wiring layer 121 c can be formed by using, asappropriate, the manner that has been described above in the step offorming the first wiring layer 112 a or the second wiring layer 112 b.

Further, the in-layer lenses 120 are formed. The in-layer lenses 120 aredisposed respectively corresponding to the photoelectric conversionportions 105. The in-layer lenses 120 are each formed of, e.g., asilicon nitride film. The in-layer lenses 120 can be formed by using oneof ordinary methods. Thereafter, color filters, microlenses, etc. areformed, above the in-layer lenses 120 on the side opposite to thesemiconductor substrate 101.

FIG. 3 is a schematic view of a planar structure of the solid-stateimage pickup device according to the first embodiment. A cross-sectiontaken along a line I, II-I, II in FIG. 3 is illustrated in FIGS. 1A to2C.

In FIG. 3, the solid-state image pickup device 100 includes the imagepickup region 103 and the peripheral region 104. The image pickup region103 may further include a light-receiving region 103 a and alight-shielding region 103 b. Many pixels are two-dimensionally arrayedin the image pickup region 103. The photoelectric conversion portions ofthe pixels arrayed in the light-shielding region 103 b are shieldedagainst light. Signals from the pixels in the light-shielding region 103b can be used as a reference for a black level.

The peripheral region 104 is a region other than the image pickup region103. In this embodiment, a vertical scanning circuit 302, a horizontalscanning circuit 303, a column amplifier 304, a column ADC (Analog toDigital Converter) 305, a memory 306, a timing generator 307, and aplurality of pads 308 are disposed in the peripheral region 104. Thosecircuits, etc. serve to process signals from the pixels. Some of thosecircuits, etc. may be dispensed with.

In this embodiment, the region where the first waveguide member 118 isremoved is denoted as a region 301 outside dotted lines in FIG. 3. Asillustrated in FIG. 3, most of the peripheral region 104 is provided asthe above-mentioned region 301.

In this embodiment, at the time of forming the first waveguide member118, the openings 116 are already formed in the surface that is to bepositioned under the first waveguide member 118. The openings 116 aredisposed only in the image pickup region 103. Alternatively, the densityof the openings 116 disposed in the image pickup region 103 is higherthan that of the openings 116 disposed in the peripheral region 104. Thefirst waveguide member 118 is formed in a larger thickness in the regionwhere a smaller number of openings 116 are formed than in the regionwhere a larger number of openings 116 are formed. Therefore, a leveldifference occurs between the region where a larger number of openings116 are formed (i.e., the image pickup region 103) and the region wherea smaller number of openings 116 are formed (i.e., the peripheral region104). Such a level difference can be reduced by removing the part of thefirst waveguide member 118, which part is disposed in the peripheralregion 104.

Modification of First Embodiment

After the step illustrated in FIG. 2B, i.e., after the planarizing ofthe first waveguide member 118, a part of the first waveguide member118, which part is formed in the peripheral region 104, may be removedas an additional step. Particularly, in the additional step the firstwaveguide member 118 in part, which is disposed at the position wherethe plug 121 is to be disposed, and which is disposed within thepredetermined distance from the position where the plug 121 is to bedisposed, is removed. Thereafter, the sixth interlayer insulating film119 is formed.

By performing the above-described step, it becomes easier to form thethrough-hole in which the plug 121 is to be disposed. The reason isdiscussed in brief below. If the first waveguide member 118 is notremoved before forming the sixth interlayer insulating film 119, thefifth interlayer insulating film 113 e, the first waveguide member 118,and the sixth interlayer insulating film 119 are present in the statestacked in this order from the side closer to the semiconductorsubstrate 101. Given such a structure, three removing steps (e.g., threeetching steps) under different conditions suitable for respective layersare used to form the through-hole. In contrast, by removing the firstwaveguide member 118 and then forming the sixth interlayer insulatingfilm 119, a structure is obtained in which the fifth interlayerinsulating film 113 e and the sixth interlayer insulating film 119 arestacked in this order from the side closer to the semiconductorsubstrate 101 in the region where the through-hole is to be formed.Thus, the removing step to form the through-hole can be performed underthe same condition by using the same material to form the fifthinterlayer insulating film 113 e and the sixth interlayer insulatingfilm 119. Accordingly, the through-hole can be formed by two removingsteps including the earlier step of removing the first waveguide member118.

Second Embodiment

A method of manufacturing the solid-state image pickup device, accordingto a second embodiment of the present invention, will be described belowwith reference to FIGS. 4A to 6C. FIGS. 4A to 6C are schematic views ofa cross-sectional structure of the solid-state image pickup device insuccessive steps of the manufacturing method according to the secondembodiment. It is to be noted that components in FIGS. 4A to 6C havingthe same functions as those in FIGS. 1A to 2C are denoted by the samereference symbols and detailed description of those components isomitted.

FIG. 4A illustrates the same step as that illustrated in FIG. 2Aregarding the first embodiment. In other words, FIG. 4A illustrates thestate where the part of the first waveguide member 118, which part isformed in the peripheral region 104, has been removed. Steps in themanufacturing method according to the second embodiment until the stepillustrated in FIG. 4A are the same as those illustrated in FIGS. 1A to2A regarding the first embodiment.

In a step illustrated in FIG. 4B, a second waveguide member 122 isformed on a surface of the first waveguide member 118 on the sideopposite to the semiconductor substrate 101. The second waveguide member122 is formed in the image pickup region 103 and the peripheral region104. In this embodiment, the step of forming the first waveguide member118 and the step of forming the second waveguide member 122 differ fromeach other in that the step of removing the part of the first waveguidemember 118, which part is disposed in the peripheral region 104, hasbeen performed before the step of forming the second waveguide member122. Thus, the second waveguide member 122 may be formed by using thesame material as that of the first waveguide member 118. Further, thesecond waveguide member 122 may be formed in the same manner as that informing the first waveguide member 118. Alternatively, the secondwaveguide member 122 may be formed by using a different material fromthat of the first waveguide member 118, and the second waveguide member122 may be formed in a different manner from that in forming the firstwaveguide member 118.

In this embodiment, the first waveguide member 118 and the secondwaveguide member 122 are made of the same material. More specifically,the second waveguide member 122 is made of silicon nitride. In thatcase, the second waveguide member 122 can be formed by CVD orsputtering. As an alternative, the second waveguide member 122 may beformed by coating an organic material represented by a polyimide-basedhigh polymer.

In this embodiment, the first waveguide member 118 and the secondwaveguide member 122 are both formed by CVD. However, process conditionsfor the CVD differ between both the cases. The second waveguide member122 may be formed by carrying out plural steps under differentconditions. Further, the second waveguide member 122 may be formed bycoating plural different kinds of materials in order.

FIG. 4C illustrates a planarizing step after forming the secondwaveguide member 122. In this embodiment, a surface of the secondwaveguide member 122 on the side opposite to the semiconductor substrate101 is planarized, or flattened, by CMP. The planarizing can beperformed by one of ordinary methods. For example, the planarizing maybe performed by polishing or etching. The first waveguide member 118 orsome other member positioned on the side closer to the semiconductorsubstrate 101 than the second waveguide member 122 may be exposed by theplanarizing. In this embodiment, the first waveguide member 118 isexposed in the peripheral region 104. The second waveguide member 122 isleft in the image pickup region 103. However, the second waveguidemember 122 may be left in the peripheral region 104 as well.

In the step illustrated in FIG. 4C, the surface of the second waveguidemember 122 on the side opposite to the semiconductor substrate 101 isnot necessarily required to be completely flat. It is just required thata level difference in the surface of the second waveguide member 122 onthe side opposite to the semiconductor substrate 101 before theplanarizing is reduced by the planarizing step. For example, in theperipheral region 104, a total film thickness of the first waveguidemember 118 and the second waveguide member 122 after the planarizing maybe in the range of 200 nm to 500 nm. Also, in a zone of the image pickupregion 103 where the openings 116 are not disposed, a total filmthickness of the first waveguide member 118 and the second waveguidemember 122 after the planarizing may be in the range of 50 nm to 350 nm.

In this embodiment, the surface of the second waveguide member 122 onthe side opposite to the semiconductor substrate 101 is exposed when theplanarizing step is performed. When another member is formed on thesecond waveguide member 122, an exposed surface of the other member isplanarized, or flattened.

In a step illustrated in FIG. 5A, a low refractive-index member 123 isformed. The refractive index of the low refractive-index member 123 islower than that of the member which is disposed on the side closer tothe semiconductor substrate 101 than the low refractive-index member 123and which is positioned in contact with the low refractive-index member123. In other words, the member disposed on the side closer to thesemiconductor substrate 101 than the low refractive-index member 123 andpositioned in contact with the low refractive-index member 123 is amember that is exposed at the time of forming the low refractive-indexmember 123. In this embodiment, both the first waveguide member 118 andthe second waveguide member 122 correspond to the above-mentionedmember. Thus, in this embodiment, the refractive index of the lowrefractive-index member 123 is lower than those of the first waveguidemember 118 and the second waveguide member 122. In practice, the lowrefractive-index member 123 is formed of a silicon oxynitride film. Thesilicon oxynitride film has a refractive index of about 1.72. It is tobe noted that the low refractive-index member 123 is not necessarilyrequired. When the low refractive-index member 123 is not disposed, thestep illustrated in FIG. 5A can be omitted.

In a step illustrated in FIG. 5B, a part of the first waveguide member118, which part is formed in the peripheral region 104, a part of thesecond waveguide member 122, which part is formed in the peripheralregion 104, or both the parts are removed. Particularly, in this stepthe first waveguide member 118 and the second waveguide member 122 inrespective parts, which are disposed at the position where a plug 121(described later) is to be disposed, and which are disposed within apredetermined distance from the position where the plug 121 is to bedisposed, is removed. Further, when the low refractive-index member 123is disposed, a part of the low refractive-index member 123, which partis disposed in the peripheral region 104, is also removed.

Depending on the steps prior to this step, one of the first waveguidemember 118 and the second waveguide member 122 may be not disposed inthe peripheral region 104. In such a case, the other of the firstwaveguide member 118 and the second waveguide member 122, which isdisposed in the peripheral region 104, is removed.

The removing step can be performed by using one of ordinary methods. Inthis embodiment, the respective parts of the first waveguide member 118,the second waveguide member 122 and the low refractive-index member 123,which parts are formed in the peripheral region 104, are removed byetching, for example.

In a step illustrated in FIG. 5C, a seventh interlayer insulating film124 is formed. The seventh interlayer insulating film 124 is formed ofthe same material as that of the fifth interlayer insulating film 113 e.A surface of the seventh interlayer insulating film 124 on the sideopposite to the semiconductor substrate 101 may be planarized, orflattened, when necessary.

By performing the steps illustrated in FIGS. 5B and 5C, it becomeseasier to form a through-hole 125 (described later) in which the plug121 is to be disposed. The reason is discussed in brief below. If thefirst waveguide member 118, the second waveguide member 122, and the lowrefractive-index member 123 are not removed before forming the seventhinterlayer insulating film 124, the first waveguide member 118, thesecond waveguide member 122, and the low refractive-index member 123 arepresent between the fifth interlayer insulating film 113 e and theseventh interlayer insulating film 124. Given such a structure, removingsteps (e.g., etching steps) under different conditions suitable forrespective layers are used in some cases to form the through-hole 125.In contrast, by removing the first waveguide member 118, the secondwaveguide member 122, and the low refractive-index member 123 beforeforming the seventh interlayer insulating film 124 and then forming theseventh interlayer insulating film 124, the fifth interlayer insulatingfilm 113 e and the seventh interlayer insulating film 124 are disposedin contact with each other in the region where the through-hole 125 isto be formed. Thus, the step of forming the through-hole 125 can beperformed with one process by using the same material to form the fifthinterlayer insulating film 113 e and the seventh interlayer insulatingfilm 124. Accordingly, the through-hole 125 can be formed by tworemoving steps including the earlier step of removing the firstwaveguide member 118. As a result, the through-hole 125 can be moreeasily formed and the manufacturing steps are simplified.

In a step illustrated in FIG. 6A, the through-hole 125 is formed in theseventh interlayer insulating film 124 at a position overlying thepredetermined electroconductive member in the second wiring layer 112 b.The through-hole 125 is formed by etching, for example.

In steps until obtaining the structure illustrated in FIG. 6B, a thirdwiring layer 121 c and in-layer lenses 120 are formed. First, the plug121 is formed in the through-hole 125. The plug 121 electricallyconnects the predetermined electroconductive member in the second wiringlayer 112 b and a predetermined electroconductive member in the thirdwiring layer 121 c.

Next, the third wiring layer 121 c is formed. In this embodiment, theelectroconductive member in the third wiring layer 121 c is made ofaluminum. The third wiring layer 121 c can be formed by using, asappropriate, the manner that has been described above in the step offorming the first wiring layer 112 a or the second wiring layer 112 b.The electroconductive member in the third wiring layer 121 c may be madeof a metal other than aluminum.

Further, in the steps until obtaining the structure illustrated in FIG.6B, the in-layer lenses 120 are formed. The in-layer lenses 120 aredisposed respectively corresponding to the photoelectric conversionportions 105. The in-layer lenses 120 are each formed of, e.g., asilicon nitride film. The in-layer lenses 120 can be formed by using oneof ordinary methods. In this embodiment, the material forming thein-layer lenses 120 is disposed in the peripheral region 104 as well.However, the material forming the in-layer lenses 120 may be disposedonly in the image pickup region 103.

Between the in-layer lenses 120 and the seventh interlayer insulatingfilm 124, an intermediate member having an intermediate refractive indexbetween the refractive indices of the former twos may be disposed. Inthis embodiment, a silicon oxynitride film (not shown) is disposedbetween the in-layer lenses 120 and the seventh interlayer insulatingfilm 124. More specifically, the refractive index of the silicon nitridefilm (i.e., the in-layer lens 120) is about 2.00, the refractive indexof the silicon oxynitride film (i.e., the intermediate member) is about1.72, and the refractive index of the silicon oxide film (i.e., theseventh interlayer insulating film 124) is about 1.45.

The above-described arrangement is effective in reducing reflectivity.That point is discussed in brief below. Generally, when light propagatesfrom a medium having a refractive index of n1 to a medium having arefractive index of n2, the reflectivity increases as the differencebetween n1 and n2 increases. When the intermediate member having theintermediate refractive index is disposed between the in-layer lenses120 and the seventh interlayer insulating film 124, the difference inrefractive index at an interface between adjacent two is reduced. As aresult, the reflectivity when light enters the seventh interlayerinsulating film 124 from the in-layer lens 120 can be reduced incomparison with that when the in-layer lens 120 and the seventhinterlayer insulating film 124 are disposed in direct contact with eachother. Similarly, with the provision of, between the seventh interlayerinsulating film 124 and the second waveguide member 122, the lowrefractive-index member 123 having an intermediate refractive indexbetween the refractive indices of the former two, the refractive indexat an interface between adjacent twos is reduced. As a result, thereflectivity when light enters the second waveguide member 122 from theseventh interlayer insulating film 124 can be reduced.

The extent of reduction in the reflectivity resulting from the provisionof the intermediate member varies depending on the relationship among afilm thickness d of the intermediate member, a refractive index N of theintermediate member, and a wavelength p of the incident light. Thereason is that multiple-reflected lights from plural interfaces canceleach other. Theoretically, given that k is an arbitrary integer equal toor more than 0, the reflectivity is minimized when the conditionexpressed by the following formula (1) is satisfied:

$\begin{matrix}{d = {\frac{p}{4N}\left( {{2k} + 1} \right)}} & (1)\end{matrix}$

Stated another way, the reflectivity is theoretically minimized when thefilm thickness of the intermediate member is an odd multiple of p/4N.Accordingly, the film thickness of the intermediate member can be set onthe basis of the above formula (1). In particular, the film thickness ofthe intermediate member satisfies the following formula (2). In oneembodiment, k=0 is satisfied in the formula (2).

$\begin{matrix}{{\frac{p}{4N}\left( {{2k} + 0.5} \right)} < d < {\frac{p}{4N}\left( {{2k} + 1.5} \right)}} & (2)\end{matrix}$

Let here suppose, e.g., an example in which the refractive index of theseventh interlayer insulating film 124 is 1.45, the refractive index ofthe intermediate member is 1.72, the refractive index of the in-layerlens 120 is 2.00, and the wavelength of the incident light is 550 nm. Onthat condition, when the film thickness of the intermediate member is 80nm, the transmittance of light transmitting from the in-layer lens 120to the seventh interlayer insulating film 124 is about 1.00. On theother hand, when the in-layer lens 120 and the seventh interlayerinsulating film 124 are disposed in direct contact with each other, thetransmittance is about 0.97.

In steps until obtaining the structure illustrated in FIG. 6C, colorfilters 127 a and 127 b and microlenses 128 are formed. First, an eighthinsulating film 126 is formed on surfaces of the in-layer lenses 120 onthe side opposite to the semiconductor substrate 101. The eighthinsulating film 126 is made of, e.g., an organic material. A surface ofthe eighth insulating film 126 on the side opposite to the semiconductorsubstrate 101 is planarized, or flattened. The eighth insulating film126 having the planarized surface on the side opposite to thesemiconductor substrate 101 can be formed, for example, by coating theorganic material that is used to form the eighth insulating film 126.

Next, the color filters 127 a and 127 b are formed. The color filters127 a and 127 b are disposed corresponding to the photoelectricconversion portions 105. The wavelength of light passing through thecolor filter 127 a may differ from that of light passing through thecolor filter 127 b. Then, the microlenses 128 are formed on surfaces ofthe color filters 127 a and 127 b on the side opposite to thesemiconductor substrate 101. The microlenses 128 can be formed by usingone of ordinary methods.

With the manufacturing method according to this embodiment, it becomeseasier to planarize the surface of the first waveguide member 118 afterthe first waveguide member 118 has been formed. Therefore, when thein-layer lenses 120, the color filters 127 a and 127 b, and themicrolenses 128 are formed, those members can be formed on theunderlying layer that has high flatness. Accordingly, the in-layerlenses 120, the color filters 127 a and 127 b, and the microlenses 128can be formed with high accuracy. As a result, image quality can beimproved.

Modification of Second Embodiment

In the second embodiment, the planarizing step illustrated in FIG. 4C isperformed after forming the second waveguide member 122. However, theplanarizing may be performed after the step illustrated in FIG. 4A, andthe second waveguide member 122 may be formed thereafter.

While the present invention has been described with reference toexemplary embodiments, it is to be understood that the invention is notlimited to the disclosed exemplary embodiments. The scope of thefollowing claims is to be accorded the broadest interpretation so as toencompass all such modifications and equivalent structures andfunctions.

This application claims the benefit of Japanese Patent Application No.2011-026354 filed Feb. 9, 2011 and No. 2011-223294 filed Oct. 7, 2011,which are hereby incorporated by reference herein in their entirety.

1. A method of manufacturing a semiconductor device including asemiconductor substrate having a first region and a second region, andan insulator disposed on the first region and the second region, themethod comprising: a first step of forming a plurality of first openingsin a first part of the insulator, wherein the first part is disposed onthe first region; a second step of, after the first step, forming afirst member in each of the plurality of first openings and on a secondpart of the insulator, wherein the second part is disposed on the secondregion; a third step of at least partially removing a part of the firstmember, wherein the part of the first member is disposed on the secondpart of the insulator; and a fourth step of, after the third step,planarizing an exposed surface above the first region and an exposedsurface above the second region.
 2. The method according to claim 1,wherein, in the first step, the plurality of first openings is notformed in the second part of the insulator.
 3. The method according toclaim 1, wherein, in the first step, a plurality of second openings isformed in the second part of the insulator at a lower density than adensity of the plurality of first openings.
 4. The method according toclaim 1, further comprising: between the third step and the forth step,forming a second member on the first member.
 5. The method according toclaim 4, wherein the exposed surface above the first region and theexposed surface above the second region being planarized in the fourthstep, are each a surface of the second member on a side opposite to thesemiconductor substrate.
 6. The method according to claim 4, furthercomprising: after the fourth step, removing the part of the firstmember, which part is disposed on the second region, and a part of thesecond member, which part is disposed on the second region.
 7. Themethod according to claim 4, further comprising: after the fourth step,removing a part of the second member, which part is disposed on thesecond region.
 8. The method according to claim 1, further comprising:after the fourth step, forming the second member on the first member. 9.The method according to claim 8, further comprising: after the formingthe second member on the first member, removing the part of the firstmember, which part is disposed on the second region, and a part of thesecond member, which part is disposed on the second region.
 10. Themethod according to claim 4, wherein the first member and the secondmember are made of a same material.
 11. The method according to claim 1,further comprising: after the fourth step, removing the part of thefirst member, which part is disposed on the second region.
 12. Themethod according to claim 1, wherein: in the third step, the part of thefirst member, which part is disposed on the second region, is partiallyremoved by etching, and after the third step, the part of the firstmember, which part is disposed on the second region, is partially lefton the insulator.
 13. The method according to claim 1, wherein theinsulator is made up of a plurality of insulating films, and theplurality of first openings penetrates through the plurality ofinsulating films.
 14. A method of manufacturing a semiconductor deviceincluding a semiconductor substrate having a first region where aplurality of photoelectric conversion portions is disposed, and a secondregion where a circuit for processing signals from the plurality ofphotoelectric conversion portions is disposed, and an insulator disposedon the first region and the second region, the method comprising: afirst step of forming a plurality of first openings in a first part ofthe insulator such that the plurality of first openings are respectivelyoverlapped with the plurality of photoelectric conversion portions; asecond step of, after the first step, forming a first member in each ofthe plurality of first openings and on a second part of the insulator,wherein the second part is disposed on the second region; a third stepof at least partially removing a part of the first member, wherein thepart of the first member is disposed on the second part of theinsulator; and a fourth step of, after the third step, planarizing anexposed surface above the first region and an exposed surface above thesecond region.
 15. The method according to claim 14, further comprising:between the third step and the forth step, forming a second member onthe first member.
 16. The method according to claim 15, wherein theexposed surface above the first region and the exposed surface above thesecond region, both the exposed surfaces being planarized in the fourthstep, are each a surface of the second member on a side opposite to thesemiconductor substrate.
 17. The method of manufacturing thesemiconductor device according to claim 15, further comprising: afterthe fourth step, removing the part of the first member, which part isdisposed on the second region, and a part of the second member, whichpart is disposed on the second region.
 18. The method according to claim15, further comprising: after the fourth step, removing a part of thesecond member, which part is disposed on the second region.
 19. Themethod according to claim 14, further comprising: after the fourth step,forming the second member on the first member.
 20. The method accordingto claim 19, further comprising: after the forming the second member onthe first member, removing the part of the first member, which part isdisposed on the second region, and a part of the second member, whichpart is disposed on the second region.
 21. The method according to claim15, wherein the first member and the second member are made of a samematerial.
 22. The method according to claim 14, further comprising:after the fourth step, removing the part of the first member, which partis disposed on the second region.
 23. The method according to claim 14,wherein: in the third step, the part of the first member, which part isdisposed above the second region, is partially removed by etching, andafter the third step, the part of the first member, which part isdisposed on the second region, is partially left on the insulator. 24.The method according to claim 14, wherein the insulator is made up of aplurality of insulating films, and the plurality of first openingspenetrates through the plurality of insulating films.
 25. The methodaccording to claim 14, wherein, in the first step, the plurality offirst openings is not formed in a second part of the insulator, whereinthe part is disposed on the second region.